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US 12,630,411 B2Granted
Interlock apparatus for chemical supply system
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsFang-Pin Chiang, Tsung-Lin Tsai, Chaoyen Huang, Yi Chuan Chen
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Abstract
The present disclosure provides a chemical supply system, including a chamber, a tubing extending into the chamber, an interlock apparatus, including a fixture for fastening the tubing, and means for determining whether the tubing is fastened by the fixture.
Claims20
A chemical supply system, comprising:
- a chamber;
- a tubing extending into the chamber;
- an interlock apparatus, comprising:
- a fixture for fastening the tubing;
- and
- means for determining whether the tubing is fastened by the fixture;
- and
- an auxiliary fixture attached to the tubing.
5 more elements
A chemical supply system, comprising:
- a chamber;
- a tubing extending into the chamber;
- and
- an interlock apparatus, comprising:
- a fixture for fastening the tubing;
- and
- a proximity sensor for determining whether the tubing is coupled to the interlock apparatus, the proximity sensor being configured to detect multiple coupling statuses between the tubing and the interlock apparatus, comprising:
- a first status in which the interlock apparatus is not coupled to any tubing;
- a second status in which all tubing removed from a used chamber are coupled to the interlock apparatus;
- and
- a third status in which at least one tubing removed from the used chamber remains coupled to the interlock apparatus.
8 more elements
A chemical supply system, comprising:
- a tubing extending into a chamber;
- a leakage container disposed on an inner sidewall of the chamber;
- and
- an interlock apparatus, comprising:
- a fixture for fastening the tubing;
- an emitter for emitting a radiation;
- and
- a receiver for receiving the radiation.
5 more elements
Dependencies are inferred from the claim text.