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US 12,629,913 B2Granted
Tube, pump including the same, and chemical solution supply apparatus
AssigneeSemes Co., Ltd.
InventorsYoungjun Son, Sunghun Eom
Life of this patent
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Abstract
A tube includes an outer layer including a first material having flexibility, an inner layer including a second material having flexibility and chemical resistance, and an intermediate layer arranged between the outer layer and the inner layer and including an electrically conductive material.
Claims9
A tube comprising:
- an outer layer comprising a first material having flexibility;
- an inner layer comprising a second material having flexibility and chemical resistance;
- and
- an intermediate layer arranged between the outer layer and the inner layer and comprising an electrically conductive material,
- wherein the first material and the second material are the same as each other.
2 more elements
Dependencies are inferred from the claim text.