Substrate conveyor robot and substrate conveying apparatus

A substrate conveying apparatus comprising:

• a substrate conveyor robot including a robot arm including a holder configured to hold a substrate and arranged in a free end of the robot arm, and an up-and-down driving mechanism configured to move the robot arm upward and downward;
• and
• a robot compartment configured to accommodate the substrate conveyor robot, wherein
• the up-and-down driving mechanism includes a stationary part including a guide rail extending in an upward/downward direction, and an up-and-down mover movable upward and downward along the guide rail,
• the robot arm includes a base link connected to the up-and-down mover turnably in a horizontal direction, and a free-end side link connected to the base link turnably in the horizontal direction and including one or more arm parts having the free end,
• the substrate conveyor robot further comprises a guide rail cover arranged on a lateral side of the guide rail to cover an upper part of the guide rail that is exposed toward the lateral side when the up-and-down mover moves downward, and
• the base link includes the guide rail cover.