Processing method of workpiece
AssigneeDisco Corporation
InventorYoshinobu Saito
Life of this patent
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Abstract
There is provided a processing method of a workpiece by which the workpiece is processed. The processing method includes a thermocompression bonding step of executing thermocompression bonding of a first sheet composed of a thermoplastic resin to a front surface side of the workpiece by disposing the first sheet on the front surface side of the workpiece and heating the first sheet, a processing step of processing the workpiece together with the first sheet, and a separation step of separating the first sheet from the workpiece by moving a second sheet composed of a thermoplastic resin after executing thermocompression bonding of the second sheet to the first sheet by disposing the second sheet on the first sheet processed and heating the second sheet.
Claims11
A processing method of a workpiece by which the workpiece is processed, the processing method comprising:
- a thermocompression bonding step of executing thermocompression bonding of a first sheet composed of a thermoplastic resin to a front surface side of the workpiece by disposing the first sheet on the front surface side of the workpiece and heating the first sheet;
- a processing step of processing the workpiece together with the first sheet;
- and
- a separation step of separating the first sheet from the workpiece by moving a second sheet composed of a thermoplastic resin after executing thermocompression bonding of the second sheet to the first sheet by disposing the second sheet on the first sheet processed and heating the second sheet,
- wherein the second sheet is an olefin-based sheet or a styrene-based sheet.
A processing method of a workpiece by which the workpiece is processed, the processing method comprising:
- a thermocompression bonding step of executing thermocompression bonding of a first sheet composed of a thermoplastic resin to a front surface side of the workpiece by disposing the first sheet on the front surface side of the workpiece and heating the first sheet;
- a processing step of processing the workpiece together with the first sheet;
- and
- a separation step of separating the first sheet from the workpiece by moving a second sheet composed of a thermoplastic resin after executing thermocompression bonding of the second sheet to the first sheet by disposing the second sheet on the first sheet processed, heating the second sheet, disposing a support pedestal which supports the second sheet and which includes a groove directly below the second sheet, positioning a cutter above the groove of the support pedestal, and lowering the cutter to cut the second sheet.
Dependencies are inferred from the claim text.