Cleaning apparatus

A cleaning apparatus comprising:

• a plurality of rollers configured to rotate a substrate in contact with an outer periphery of the substrate;
• a rotation mechanism including a motor and configured to rotate the rollers about a rotation shaft;
• a cover interposed between the rollers and the rotation mechanism to cover the rotation mechanism;
• an ejection port provided in the cover and configured to eject gas between the cover and the rollers, the ejection port being configured as a plurality of openings;
• a negative pressure region provided in the cover on a side of the rotation mechanism and having a negative pressure lower than an atmospheric pressure outside the cover through exhaust;
• a liquid ejector configured to eject a cleaning liquid onto the substrate;
• and
• a cleaning unit including a brush configured to bring the brush into contact with at least one surface of the substrate that is being rotated, thereby cleaning the surface of the substrate.

A cleaning apparatus comprising:

• a plurality of rollers configured to rotate a substrate in contact with an outer periphery of the substrate;
• a rotation mechanism including a motor and configured to rotate the rollers about a rotation shaft;
• a cover interposed between the rollers and the rotation mechanism to cover the rotation mechanism;
• an ejection port provided in the cover and configured to eject gas between the cover and the rollers;
• a negative pressure region provided in the cover on a side of the rotation mechanism and having a negative pressure lower than an atmospheric pressure outside the cover through exhaust;
• a liquid ejector configured to eject a cleaning liquid onto the substrate;
• a cleaning unit including a brush configured to bring the brush into contact with at least one surface of the substrate that is being rotated, thereby cleaning the surface of the substrate;
• an exhauster configured to perform exhaustion from the negative pressure region;
• a pressure detector configured to detect a pressure in the negative pressure region;
• and
• a pressure controller configured to control the exhaust to maintain a negative pressure of a predetermined value in the negative pressure region relative to an outside of the roller according to a detection result obtained by the pressure detector.