Film forming method and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorsJumpei Shirono, Toshiki Ito, Naoki Kiyohara
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Abstract
The present invention provides a film forming method comprising: discretely arranging, on a substrate with unevenness, a plurality of droplets of a curable composition in a liquid form containing at least a polymerizable compound (a) as a nonvolatile component and at least a solvent (d) as a volatile component; waiting until each of the plurality of droplets discretely arranged on the substrate combines with an adjacent droplet to form a continuous liquid film on the substrate, and the solvent (d) contained in the liquid film volatilizes, and a content of the solvent (d) becomes not more than 10 vol % with respect to the whole liquid film; and curing the curable composition in the liquid form after the waiting.
Claims12
A film forming method comprising:
- discretely arranging, on a substrate with unevenness, a plurality of droplets of a curable composition in a liquid form containing at least a polymerizable compound (a) as a nonvolatile component and at least a solvent (d) as a volatile component;
- waiting until each of the plurality of droplets discretely arranged on the substrate combines with an adjacent droplet to form a continuous liquid film on the substrate, and the solvent (d) contained in the liquid film volatilizes, and a content of the solvent (d) becomes not more than 10 vol % with respect to the whole liquid film;
- and
- curing the curable composition in the liquid form after the waiting,
- wherein the substrate includes a plurality of regions having different average heights,
- in the arranging, the curable composition is arranged such that an average liquid film thickness of the curable composition arranged in a certain region is larger by an offset amount than the average liquid film thickness of the curable composition arranged in a most projecting part region of the substrate, and
- the offset amount is determined in accordance with the content of the solvent (d) that volatizes in the waiting, and a curing shrinkage rate of the curable composition.
Dependencies are inferred from the claim text.