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US 12,629,702 B2Granted
Showerhead assembly and substrate processing apparatus
AssigneeTes Co., Ltd
InventorsKyung-Ho Jang, Byeong-Ho Yun, Min-Wook Kang
Life of this patent
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Abstract
The present disclosure relates to a showerhead assembly and a substrate processing apparatus, and more particularly to a showerhead assembly and a substrate processing apparatus including a ceramic heater that heats a substrate and by which hole processing is freely performed in a relatively high temperature process.
Claims15
A showerhead assembly comprising:
- a heater body configured to heat a substrate and made of ceramic, including a plurality of supply holes supplying at least one process gas toward the substrate;
- and
- a flow path plate unit provided at an upper portion of the heater body and made of ceramic, including a supply flow path communicating with the plurality of supply holes;
- wherein the flow path plate unit includes n flow path plates including a supply flow path communicating with the plurality of supply holes and n is a natural number equal to or greater than 2,
- wherein the n flow path plates include:
- a lowermost flow path plate providing a first flow path of a first process gas, wherein the first flow path is formed between the lowermost flow path plate and the heater body;
- and
- an uppermost flow path plate providing an nth flow path of an nth process gas between the uppermost flow path plate and a flow path plate located at a lower portion of the uppermost flow path plate,
- wherein a stem is provided at a central portion of the heater body,
- wherein a plurality of through holes of a remaining process gas except for the first process gas are formed in the lowermost flow path plate, and the through holes communicate with the supply holes of the heater body and the lowermost flow path plate includes a first opening with a central portion through which the stem passes,
- wherein the first flow path communicates with the first opening at a central portion of the lowermost flow path plate and communicates with an outside of the flow path plate unit at an edge of the lowermost flow path plate,
- wherein the first process gas flows into the first flow path through the first opening and is supplied downwardly at an edge of the heater body.
9 more elements
A showerhead assembly comprising:
- a heater body configured to heat a substrate and made of ceramic, including a plurality of supply holes supplying at least one process gas toward the substrate;
- and
- a flow path plate unit provided at an upper portion of the heater body and made of ceramic, including a supply flow path communicating with the plurality of supply holes;
- wherein the flow path plate unit includes n flow path plates including a supply flow path communicating with the plurality of supply holes and n is a natural number equal to or greater than 2,
- wherein the n flow path plates include:
- a lowermost flow path plate providing a first flow path of a first process gas, wherein the first flow path is formed between the lowermost flow path plate and the heater body;
- and
- an uppermost flow path plate providing an nth flow path of an nth process gas between the uppermost flow path plate and a flow path plate located at a lower portion of the uppermost flow path plate,
- wherein the flow path plate unit further includes at least one intermediate flow path plate between the lowermost flow path plate and the uppermost flow path plate,
- wherein the intermediate flow path plate provides a flow path between a flow path plate directly below and the intermediate flow path plate and includes a through hole through which a process gas of a flow path plate located at an upper portion provides.
7 more elements
A showerhead assembly comprising:
- a heater body configured to heat a substrate and made of ceramic, including a plurality of supply holes supplying at least one process gas toward the substrate;
- and
- a flow path plate unit provided at an upper portion of the heater body and made of ceramic, including a supply flow path communicating with the plurality of supply holes;
- wherein the flow path plate unit includes n flow path plates including a supply flow path communicating with the plurality of supply holes and n is a natural number equal to or greater than 2,
- wherein the n flow path plates include:
- a lowermost flow path plate providing a first flow path of a first process gas, wherein the first flow path is formed between the lowermost flow path plate and the heater body;
- and
- an uppermost flow path plate providing an nth flow path of an nth process gas between the uppermost flow path plate and a flow path plate located at a lower portion of the uppermost flow path plate,
- wherein the flow path plate unit further includes at least one intermediate flow path plate between the lowermost flow path plate and the uppermost flow path plate,
- wherein a stem is provided at a central portion of the heater body,
- wherein an intermediate supply of a process gas of a corresponding intermediate flow path plate disposed apart from the stem is formed on the intermediate flow path plate,
- wherein an opening through which the stem passes is formed in a central portion of the intermediate flow path plate.
9 more elements
Dependencies are inferred from the claim text.