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US 12,629,670 B2Granted
Methods and apparatus for a cooled chemical cabinet
AssigneeASM IP Holding B.V.
InventorsAndrew Michael Yednak, III, Joseph Guardiola
Life of this patent
Estimating the term…
Abstract
Methods and apparatus for a cooled chemical cabinet include a cooling duct configured to cool a heatsink coupled to a thermoelectric module (TEM). The cooling duct includes a fan configured to pull air into an inlet duct and onto the heatsink. The air pulled in by the fan absorbs the heat from the heatsink. The cooling duct further includes an exhaust duct connected to the fan and configured to expel the heated air. The exhaust duct is configured to expel the heated air outside the chemical cabinet and away from the TEM.
Claims20
An apparatus comprising:
- a cabinet comprising a bottom plate, a top plate, and a plurality of sidewalls including at least a first sidewall, wherein the plurality of sidewalls, the bottom plate, and the top plate define an interior space of the cabinet;
- a vessel assembly positioned within the interior space and comprising a vessel configured to contain a chemical;
- a thermoelectric module positioned within the interior space abutting and in physical contact with the vessel assembly;
- a heatsink abutting the thermoelectric module;
- and
- a cooling duct positioned within the first sidewall, fluidically isolated from the interior space and adjacent to the heatsink.
3 more elements
An apparatus comprising:
- a cabinet comprising a bottom plate, a top plate, and a plurality of sidewalls including at least a first sidewall including a first opening, wherein the plurality of sidewalls, the bottom plate, and the top plate define an interior space of the cabinet;
- a vessel assembly positioned within the interior space and comprising a vessel configured to contain a chemical;
- a thermoelectric module positioned within the interior space and comprising a first plate and a second plate, wherein the first plate is abutting and in physical contact with the vessel assembly and the second plate is parallel to the first plate;
- a heatsink in direct contact with the second plate;
- and
- a cooling duct comprising:
- an inlet air duct positioned at the first opening;
- a fan located within the inlet air duct and positioned adjacent to and spaced apart from the heatsink;
- and
- an exhaust duct connected to the inlet air duct and positioned adjacent to the fan and the heatsink,
- wherein the cooling duct is fluidly isolated from the interior space of the cabinet.
8 more elements
Dependencies are inferred from the claim text.