Recursive flow gas mixer
AssigneeApplied Materials, Inc.
InventorsShreyas Patil S, Sandesh Y D, Manjunatha P. Koppa
Life of this patent
Estimating the term…
Loading patent…
AssigneeApplied Materials, Inc.
InventorsShreyas Patil S, Sandesh Y D, Manjunatha P. Koppa
Estimating the term…
Methods and apparatus for gas mixing are provided. In some embodiments, a gas mixing apparatus includes: a tubular body having a wall extending longitudinally from a first end to a second end and having an outer side and an inner side that surrounds a central through opening and defining a first flow path between the first end and the second end; one or more inlet holes formed in the outer side of the wall; a plurality of exit holes formed in the inner side of the wall and communicating with the central through opening; and a plurality of longitudinal channels formed within the wall fluidly coupled to the one or more inlet holes and the plurality of exit holes, wherein the one or more inlet holes, the plurality of exit holes, and the plurality of longitudinal channels define a recursive second flow path that intersects with the first flow path.
A gas mixing apparatus, comprising:
A gas mixing system, comprising:
A method of gas mixing, comprising:
Dependencies are inferred from the claim text.