Degassing apparatus
AssigneeDIC Corporation
InventorsTakaaki Fuse, Kazumi Oi, Naoki Hada, Youhei Suganuma, Kazuyasu Kawashima, Akira Sato
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AssigneeDIC Corporation
InventorsTakaaki Fuse, Kazumi Oi, Naoki Hada, Youhei Suganuma, Kazuyasu Kawashima, Akira Sato
Estimating the term…
A degassing apparatus capable of preventing cross-contamination is provided. A degassing apparatus includes degassing modules each having a tube unit that is a gas permeable membrane separating a fluid circulation space and a reduced-pressure space from each other, vacuum piping communicatively connected to the reduced-pressure spaces, a discharge device that discharges gas in the reduced-pressure spaces through the vacuum piping, atmospheric release piping communicatively connected to the reduced-pressure spaces, an atmospheric release valve capable of introducing atmosphere into the reduced-pressure spaces through the atmospheric release piping, and a control unit that controls the operation of the discharge device and the atmospheric release valve. The control unit performs control to close the atmospheric release valve to perform a process of discharging gas in the reduced-pressure spaces by the discharge device when a degassing process is being performed, and performs control to open the atmospheric release valve to open the reduced-pressure spaces.
A degassing apparatus comprising:
Dependencies are inferred from the claim text.