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US 12,628,601 B2Granted
Filter structure and substrate treating system including filter structure
AssigneeSamsung Electronics Co., Ltd.
InventorsYunho Kim, Heechul Park, Hyunwoo Kim, Yigil Cho, Jaeeun Song, Jinhyeok Jang
Life of this patent
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Abstract
A filter structure includes a housing having an inlet and an outlet; a first filter embedded in the housing and including a polymer membrane for filtering a first fluid flowing from the inlet into the housing; and a second filter embedded in the housing, filtering a second fluid filtered by the first filter, and including mesoporous silica nanoparticles (MSN).
Claims20
A filter structure, comprising:
- a housing having an inlet and an outlet;
- a first filter in the housing and including a polymer membrane for filtering a first fluid flowing from the inlet into the housing;
- and
- a second filter in the housing, filtering a second fluid filtered by the first filter, and including mesoporous silica nanoparticles (MSN),
- wherein the second filter includes a tube having a non-linear flow path.
2 more elements
A substrate treating system, comprising:
- a process chamber performing a semiconductor process on a substrate;
- a supply source supplying fluid to the process chamber;
- and
- a filter structure disposed between the supply source and the process chamber,
- wherein the filter structure includes:
- a first filter primarily filtering a first fluid supplied from the supply source and including a polymer membrane;
- and
- a second filter secondarily filtering a second fluid filtered by the first filter and including mesoporous silica nanoparticles having a functional group on a surface thereof,
- wherein the second filter includes a tube having a non-linear flow path.
6 more elements
A filter structure, comprising:
- a first filter filtering fluid and including a polymer membrane;
- and
- a second filter filtering fluid passing through the first filter,
- wherein the second filter includes mesoporous silica nanoparticles having a particle size of about 50 nm to about 500 nm and a pore size of about 5 nm to about 20 nm and including one or more of functional groups of a thiol group and an amine group on a surface thereof, and
- wherein the second filter includes a tube having a non-linear flow path.
2 more elements
Dependencies are inferred from the claim text.