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US 12,628,545 B2Granted
Organic vapor jet printing system
AssigneeUniversal Display Corporation
InventorsJeff Hawthorne, Sriram Krishnaswami, Kent Khuong Nguyen
Life of this patent
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Abstract
A chuck for holding a workpiece in a deposition system is provided, which includes a base having a base surface with a flatness tolerance of not greater than 30 μm and a clamp having a surface configured to be attached to a substrate, which has a flatness tolerance of not greater than 30 μm. The clamp also includes a substrate holder configured to hold a substrate above the second clamp surface.
Claims19
A device for holding a workpiece in a material deposition system, the device comprising:
- a base having a base surface with a flatness tolerance of not greater than 30 μm;
- and
- a clamp comprising:
- a first clamp surface attached to the base surface;
- a second clamp surface configured to be attached to a substrate, the second clamp surface having a flatness tolerance of not greater than 30 μm;
- and
- a substrate holder configured to hold a substrate above the second clamp surface.
4 more elements
A method of fabricating a pressure-vacuum chuck, the method comprising:
- obtaining a substrate support device having a first surface;
- and
- adjusting the flatness of the first surface using a closed-loop polishing process with optical interferometric measurement of a global surface flatness of the at least one surface.
Dependencies are inferred from the claim text.