Method for manufacturing stacked thin film, method for manufacturing solar cell, multi-junction solar cell, solar cell module, and photovoltaic power generation system

A method for manufacturing a stacked thin film, comprising:

• forming a p-electrode on a substrate;
• forming a film that mainly contains a cuprous oxide and/or a complex oxide of cuprous oxides on the p-electrode;
• and
• performing an oxidation treatment on the film that mainly contains the cuprous oxide and/or the complex oxide of cuprous oxides,
• wherein an ozone partial pressure in the oxidation treatment is from 5 [Pa] to 200 [Pa] where both the lower and upper endpoints of the ozone partial pressure range are inclusive,
• a treatment temperature in the oxidation treatment is from 273 [K] to 323 [K] where both the lower and upper endpoint of the treatment temperature range are inclusive, and
• a treatment time in the oxidation treatment is from 1 second to 60 minutes where both the lower and upper endpoints of the treatment time range are inclusive.