US 12,628,271 B2 · Electronic component

Abstract

To prevent interfacial peeling due to the stress of an insulating layer in a capacitor-inductor integrated electronic component having three or more conductor layers. An electronic component includes: a conductor layer M1 including a conductor pattern constituting an inductor; a conductor pattern overlapping a part of the conductor pattern through a dielectric film; an insulating layer covering the conductor layer M1 and conductor pattern; a conductor layer M2 provided on the insulating layer and including a conductor pattern constituting the inductor; and an insulating layer covering the conductor layer M2. The conductor layer M2 is formed to be branching from or independently of the conductor pattern and further includes a dummy pattern overlapping the conductor pattern. This prevents the stress of the insulating layer from being directly applied to the conductor pattern to thereby prevent peeling at the interface between the conductor layer M1 and the dielectric film.

Claims11

Dependent claims

An electronic component comprising:

a first conductor layer including a first inductor pattern;
an upper electrode of a capacitor overlapping a part of the first inductor pattern through a dielectric film;
a first insulating layer covering the first conductor layer and the upper electrode;
a second conductor layer being disposed on the first insulating layer and including a second inductor pattern;
and
a second insulating layer covering the second conductor layer,
wherein one end of the second inductor pattern is connected to one end of the first inductor pattern through a first via formed in the first insulating layer,
wherein the part of the first inductor pattern is configured to form a lower electrode of the capacitor,
wherein the second conductor layer further includes a dummy pattern formed to be branching from, or independently of, the second inductor pattern, and
wherein the dummy pattern covers the upper electrode via the first insulating layer such that a part of the first insulating layer is sandwiched between the upper electrode and the dummy pattern in a stacking direction.

7 more elements

Dependencies are inferred from the claim text.

Electronic component

Life of this patent

Electronic component

Life of this patent

Abstract

Claims11