RF signal parameter measurement in an integrated circuit fabrication chamber

An apparatus to estimate parameters of a radio frequency (RF) signal coupled to an integrated circuit fabrication chamber comprising a plurality of stations, comprising:

• a plurality of voltage sensors, each configured to provide an indication of a voltage of the RF signal;
• a plurality of current sensors, each configured to provide an indication of a current conducted by the RF signal;
• a multiplexer configured to:
• select a voltage sensor of the plurality of voltage sensors and a current sensor of the plurality of current sensors, wherein the selected voltage sensor and the selected current sensor correspond to a selected station of the plurality of stations;
• and
• provide outputs of the selected voltage and the selected current sensor to an analog-to-digital converter,
• the analog-to-digital converter configured to receive outputs from the voltage sensor and the current sensor and configured to provide digital representations of the voltage of the RF signal and the current conducted by the RF signal based on the outputs from the voltage sensor and the current sensor;
• and
• one or more processors configured to determine, based on the digital representations of the voltage and the current of the RF signal:
• a peak voltage associated with the digital representation of the voltage, a peak current associated with the digital representation of the current, and power characteristics associated with the RF signal.