Vaporizer and ion source
AssigneeNissin Ion Equipment Co., Ltd.
InventorsGeorge Sacco, Sami K. Hahto
Life of this patent
Estimating the term…
Abstract
An ion source includes a vaporizer, an arc chamber, and an extraction electrode. The vaporizer includes a crucible and a heater. The crucible stores a solid material. The heater heats the crucible. The crucible has an interior space formed by a wall, an inlet connected to the wall that releases a reactive gas into the interior space, and an outlet connected to the wall that releases the reactive gas and a vapor of the reaction product generated by a reaction between the solid material and the reactive gas from the interior space. The interior space narrows toward at least one of the inlet and the outlet.
Claims14
A vaporizer comprising:
- a crucible configured to receive a solid material;
- and
- a heater that heats the crucible,
- wherein the crucible includes:
- a wall forming an interior space of the crucible,
- an inlet connected to the wall that releases a reactive gas into the interior space, and
- an outlet connected to the wall that releases the reactive gas and a vapor of a reaction product generated by a reaction between the solid material and the reactive gas from the interior space, and
- wherein the interior space of the crucible narrows toward at least one of the inlet and or the outlet.
A vaporizer comprising:
- a crucible configured to receiving a solid material, the crucible comprising an inlet for receiving a reactive gas into the crucible, an outlet through which the reactive gas and vapor are released from the crucible, and a wall that connects the inlet to the outlet;
- and
- a heater that heats the crucible,
- wherein:
- a first portion of the wall extends in parallel to a direction connecting the inlet and the outlet,
- a second portion of the wall connects the first portion to the inlet,
- a third portion of the wall connects the first portion to the outlet, and
- at least one of a dimension of the second portion decreases toward the inlet or a dimension of the third portion decreases toward the outlet.
Dependencies are inferred from the claim text.