X-ray window with stack of layers
AssigneeMoxtek, Inc.
InventorGhazaleh Allaedini
Life of this patent
Estimating the term…
Abstract
A mounted x-ray window 10 and 20 can include an x-ray window 18 mounted on the flange 11f of a housing 11. The x-ray window 18 can include the following layers: a top strong layer 17, a stress-relief layer 16, a bottom strong layer 15, an adhesive layer 14 then a support ring 13. These layers can have a material composition and thickness for optimizing x-ray window low gas permeability, low outgassing, high strength, low visible and infrared light transmission, high x-ray flux, low atomic number materials, corrosion resistance, high reliability, and low-cost.
Claims20
A mounted x-ray window comprising:
- a housing including a flange encircling an aperture;
- an x-ray window mounted on the flange and spanning and covering the aperture;
- the x-ray window including the following layers in the following order:
- a top strong layer, a stress-relief layer, a bottom strong layer, an adhesive layer, then a support ring,
- the support ring located closest to the flange than any other layer of the x-ray window;
- the support ring includes a hole that is aligned with the aperture;
- the top strong layer includes boron, the stress-relief layer includes polyimide, the bottom strong layer includes boron, and the adhesive layer includes polyimide;
- a bonding ring is sandwiched between the support ring and the flange, the bonding ring sealing the support ring to the flange;
- and
- wherein the support ring includes:
- ≥24 mass percent and ≤34 mass percent nickel;
- ≥7 mass percent and ≤27 mass percent cobalt;
- ≥43 mass percent and ≤64 mass percent iron;
- and a sum of the above mass percentages plus mass percentages of trace elements equal 100 mass percent.
A mounted x-ray window comprising:
- a housing including a flange encircling an aperture;
- an x-ray window mounted on the flange and spanning and covering the aperture;
- the x-ray window including the following layers in the following order:
- a top strong layer, a stress-relief layer, a bottom strong layer, an adhesive layer, then a support ring;
- the top strong layer located farther from the flange than any other layer of the x-ray window;
- the top strong layer and the bottom strong layer each include boron;
- the top strong layer and the bottom strong layer each include hydrogen, carbon, aluminum, nitrogen, or combinations thereof;
- the stress-relief layer and the adhesive layer each include a polymer;
- the support ring includes a hole that is aligned with the aperture;
- a bonding ring between the support ring and the flange, the bonding ring sealing the support ring to the flange;
- and
- wherein the support ring includes:
- ≥24 mass percent and ≤34 mass percent nickel;
- ≥7 mass percent and ≤27 mass percent cobalt;
- ≥43 mass percent and ≤64 mass percent iron;
- and a sum of the above mass percentages plus mass percentages of trace elements in the support ring equal 100 mass percent.
A mounted x-ray window comprising:
- a housing including a flange encircling an aperture;
- an x-ray window mounted on the flange and spanning and covering the aperture;
- the x-ray window including the following layers in the following order:
- a top strong layer, a stress-relief layer, a bottom strong layer, an adhesive layer, then a support ring;
- the top strong layer located farther from the flange than any other layer of the x-ray window;
- the top strong layer and the bottom strong layer each include boron;
- the top strong layer and the bottom strong layer each include hydrogen, carbon, aluminum, nitrogen, or combinations thereof;
- the stress-relief layer and the adhesive layer each include a polymer;
- the support ring includes a hole that is aligned with the aperture;
- a bonding ring between the support ring and the flange, the bonding ring sealing the support ring to the flange;
- a thickness of the top strong layer at the aperture is ≥2 and ≤10 times thicker than the stress-relief layer;
- a thickness of the bottom strong layer at the aperture is ≥2 and ≤10 times thicker than the stress-relief layer;
- and
- a thickness of the stress-relief layer at the aperture is ≥1.5 and ≤6 times thicker than the adhesive layer.
A mounted x-ray window comprising:
- a housing including a flange encircling an aperture;
- an x-ray window mounted on the flange and spanning and covering the aperture;
- the x-ray window including the following layers in the following order:
- a top strong layer, a stress-relief layer, a bottom strong layer, an adhesive layer, then a support ring;
- the top strong layer located farther from the flange than any other layer of the x-ray window;
- the top strong layer and the bottom strong layer each include boron;
- the top strong layer and the bottom strong layer each include hydrogen, carbon, aluminum, nitrogen, or combinations thereof;
- the stress-relief layer and the adhesive layer each include a polymer;
- the support ring includes a hole that is aligned with the aperture;
- a bonding ring between the support ring and the flange, the bonding ring sealing the support ring to the flange;
- a thickness of the top strong layer at the aperture is ≥800 nm and ≤4000 nm;
- a thickness of the bottom strong layer at the aperture is ≥800 nm and ≤4000 nm;
- a thickness of the stress-relief layer at the aperture is ≥50 nm and ≤800 nm;
- and
- a thickness of the adhesive layer is ≥20 nm and ≤300 nm.
Dependencies are inferred from the claim text.