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US 12,626,475 B2Granted
Sample observation device and sample observation method
AssigneeHamamatsu Photonics K.K.
InventorsSatoshi Yamamoto, Masanori Matsubara
Life of this patent
Estimating the term…
Abstract
In a sample observation device, an image acquisition unit 6 acquires a plurality of pieces of image data of a sample in a Y-axis direction, and an image generation unit generates luminance image data on luminance of the sample on the basis of the plurality of pieces of image data, binarizes luminance values of each of the plurality of pieces of image data to generate a plurality of pieces of binarized image data, and generates area image data on an existing area of the sample on the basis of the plurality of pieces of binarized image data.
Claims26
A sample observation device comprising:
- an irradiation optical system comprising an optical shaping element, configured to irradiate a sample with planar light on an XZ surface;
- a scanning unit comprising a moving stage, configured to scan the sample in a Y-axis direction to pass through an irradiation surface of the planar light;
- an imaging optical system comprising a lens, having an observation axis inclined with respect to the irradiation surface and configured to image an observation light generated in the sample by irradiation with the planar light;
- an image acquisition unit comprising an image sensor, configured to acquire a plurality of pieces of XZ image data corresponding to an optical image of the observation light imaged by the imaging optical system;
- an image generation unit comprising a processor, configured to generate observation image data of the sample on the basis of the plurality of pieces of XZ image data acquired by the image acquisition unit;
- and
- an analysis unit comprising a processor, configured to extract information on the sample on the basis of the observation image data and to execute analysis on the sample,
- wherein the image acquisition unit acquires a plurality of pieces of the XZ image data in the Y-axis direction, and
- wherein the image generation unit generates luminance image data on luminance of the sample on the basis of the plurality of pieces of XZ image data, binarizes luminance values of each of the plurality of pieces of XZ image data to generate a plurality of pieces of binarized XZ image data, generates area image data on an existing area of the sample on the basis of the plurality of pieces of binarized XZ image data, and generates Z-axis position X image data from the area image data, a pixel value of the generated Z-axis position X image data is a coordinate value indicating a position in a Z-axis direction.
6 more elements
A sample observation device comprising:
- an irradiation optical system comprising an optical shaping element, configured to irradiate a sample with planar light on an XZ surface;
- a scanning unit comprising a moving stage, configured to scan the sample in a Y-axis direction to pass through an irradiation surface of the planar light;
- an imaging optical system comprising a lens, having an observation axis inclined with respect to the irradiation surface and configured to image an observation light generated in the sample by irradiation with the planar light;
- an image acquisition unit comprising an image sensor, configured to acquire a plurality of pieces of XZ image data corresponding to an optical image of the observation light imaged by the imaging optical system;
- an image generation unit comprising a processor, configured to generate observation image data of the sample on the basis of the plurality of pieces of XZ image data acquired by the image acquisition unit;
- and
- an analysis unit comprising a processor, configured to extract information on the sample on the basis of the observation image data and to execute analysis on the sample,
- wherein the image acquisition unit acquires a plurality of pieces of the XZ image data in the Y-axis direction,
- wherein the image generation unit generates luminance image data on luminance of the sample on the basis of the plurality of pieces of XZ image data, binarizes luminance values of each of the plurality of pieces of XZ image data to generate a plurality of pieces of binarized XZ image data, and generates area image data on an existing area of the sample on the basis of the plurality of pieces of binarized XZ image data, and
- wherein the analysis unit extracts a maximum luminance value in a Z-axis direction from each of the plurality of pieces of XZ image data constituting the luminance image data to generate maximum luminance X image data and couples pieces of the maximum luminance X image data in the Y-axis direction to generate maximum luminance XY image data on a maximum luminance value of the sample.
7 more elements
A sample observation device comprising:
- an irradiation optical system comprising an optical shaping element, configured to irradiate a sample with planar light on an XZ surface;
- a scanning unit comprising a moving stage, configured to scan the sample in a Y-axis direction to pass through an irradiation surface of the planar light;
- an imaging optical system comprising a lens, having an observation axis inclined with respect to the irradiation surface and configured to image an observation light generated in the sample by irradiation with the planar light;
- an image acquisition unit comprising an image sensor, configured to acquire a plurality of pieces of XZ image data corresponding to an optical image of the observation light imaged by the imaging optical system;
- an image generation unit comprising a processor, configured to generate observation image data of the sample on the basis of the plurality of pieces of XZ image data acquired by the image acquisition unit;
- and
- an analysis unit comprising a processor, configured to extract information on the sample on the basis of the observation image data and to execute analysis on the sample,
- wherein the image acquisition unit acquires a plurality of pieces of the XZ image data in the Y-axis direction,
- wherein the image generation unit generates luminance image data on luminance of the sample on the basis of the plurality of pieces of XZ image data, binarizes luminance values of each of the plurality of pieces of XZ image data to generate a plurality of pieces of binarized XZ image data, and generates area image data on an existing area of the sample on the basis of the plurality of pieces of binarized XZ image data, and
- wherein the analysis unit extracts a minimum luminance value in a Z-axis direction from each of the plurality of pieces of XZ image data constituting the luminance image data to generate minimum luminance X image data and couples pieces of the minimum luminance X image data in the Y-axis direction to generate minimum luminance XY image data on a minimum luminance value of the sample.
7 more elements
A sample observation method comprising:
- an irradiation step of irradiating a sample with planar light on an XZ surface;
- a scanning step of scanning the sample in a Y-axis direction to pass through an irradiation surface of the planar light;
- an imaging step of imaging of an observation light generated in the sample by irradiation with the planar light using an imaging optical system having an observation axis inclined with respect to the irradiation surface;
- an image acquisition step of acquiring a plurality of pieces of XZ image data corresponding to an optical image of the observation light imaged by the imaging optical system;
- an image generation step of generating observation image data of the sample on the basis of the plurality of pieces of XZ image data;
- and
- an analysis step of extracting information on the sample on the basis of the observation image data and executing analysis on the sample,
- wherein, in the image acquisition step, a plurality of pieces of the XZ image data are acquired in the Y-axis direction, and
- wherein, in the image generation step, luminance image data on luminance of the sample is generated on the basis of the plurality of pieces of XZ image data, luminance values of each of the plurality of pieces of XZ image data are binarized to generate a plurality of pieces of binarized XZ image data, area image data on an existing area of the sample is generated on the basis of the plurality of pieces of binarized XZ image data, and Z-axis position X image data is generated from the area image data, a pixel value of the generated Z-axis position X image data is a coordinate value indicating a position in a Z-axis direction.
6 more elements
A sample observation method comprising:
- an irradiation step of irradiating a sample with planar light on an XZ surface;
- a scanning step of scanning the sample in a Y-axis direction to pass through an irradiation surface of the planar light;
- an imaging step of imaging of an observation light generated in the sample by irradiation with the planar light using an imaging optical system having an observation axis inclined with respect to the irradiation surface;
- an image acquisition step of acquiring a plurality of pieces of XZ image data corresponding to an optical image of the observation light imaged by the imaging optical system;
- an image generation step of generating observation image data of the sample on the basis of the plurality of pieces of XZ image data;
- and
- an analysis step of extracting information on the sample on the basis of the observation image data and executing analysis on the sample,
- wherein, in the image acquisition step, a plurality of pieces of the XZ image data are acquired in the Y-axis direction,
- wherein, in the image generation step, luminance image data on luminance of the sample is generated on the basis of the plurality of pieces of XZ image data, luminance values of each of the plurality of pieces of XZ image data are binarized to generate a plurality of pieces of binarized XZ image data, and area image data on an existing area of the sample is generated on the basis of the plurality of pieces of binarized XZ image data, and
- wherein, in the analysis step, a maximum luminance value in a Z-axis direction from each of the plurality of pieces of XZ image data constituting the luminance image data is extracted to generate maximum luminance X image data, and pieces of the maximum luminance X image data are coupled in the Y-axis direction to generate maximum luminance XY image data on a maximum luminance value of the sample.
7 more elements
A sample observation method comprising:
- an irradiation step of irradiating a sample with planar light on an XZ surface;
- a scanning step of scanning the sample in a Y-axis direction to pass through an irradiation surface of the planar light;
- an imaging step of imaging of an observation light generated in the sample by irradiation with the planar light using an imaging optical system having an observation axis inclined with respect to the irradiation surface;
- an image acquisition step of acquiring a plurality of pieces of XZ image data corresponding to an optical image of the observation light imaged by the imaging optical system;
- an image generation step of generating observation image data of the sample on the basis of the plurality of pieces of XZ image data;
- and
- an analysis step of extracting information on the sample on the basis of the observation image data and executing analysis on the sample,
- wherein, in the image acquisition step, a plurality of pieces of the XZ image data are acquired in the Y-axis direction,
- wherein, in the image generation step, luminance image data on luminance of the sample is generated on the basis of the plurality of pieces of XZ image data, luminance values of each of the plurality of pieces of XZ image data are binarized to generate a plurality of pieces of binarized XZ image data, and area image data on an existing area of the sample is generated on the basis of the plurality of pieces of binarized XZ image data, and
- wherein, in the analysis step, a minimum luminance value in a Z-axis direction from each of the plurality of pieces of XZ image data constituting the luminance image data is extracted to generate minimum luminance X image data, and pieces of the minimum luminance X image data are coupled in the Y-axis direction to generate minimum luminance XY image data on a minimum luminance value of the sample.
7 more elements
Dependencies are inferred from the claim text.