Illumination apparatus and illumination method
AssigneeLasertec Corporation
InventorsKeitaro Hayashida, Shinji Tanaka, Masaki Koichi, Haruhiko Kusunose
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Abstract
Provided are an illumination apparatus and an illumination method capable of uniformly illuminating a visual field region detected by a detector. The present disclosure provides an illumination apparatus including: a drive unit configured to drive an optical member such that illumination light scans, in one direction, a visual field region that is a region extending in the one direction on a sample; and a control unit configured to control the drive unit to cause the illumination light to scan in synchronization with a transfer of a sensor that receives light from the visual field region illuminated by the illumination light.
Claims24
An illumination apparatus comprising:
- a drive unit configured to drive an optical member such that illumination light has a moving component that scans, in one direction, a visual field region that is a region extending in the one direction on a sample;
- and
- a control unit configured to control the drive unit to cause the illumination light having the moving component in one direction to scan in synchronization with an integration cycle of a TDI sensor that receives light from the visual field region illuminated by the illumination light,
- wherein the sample is an object for which images are acquired by the TDI sensor.
An illumination apparatus comprising:
- a drive unit configured to drive an optical member such that illumination light has a moving component that scans, in one direction, a visual field region that is a region extending in the one direction on a sample;
- and
- a control unit configured to control the drive unit to cause the illumination light to scan in the one direction more than a predetermined number of times in one cycle of an integration cycle of the TDI sensor that receives light from the visual field region illuminated by the illumination light,
- wherein the sample is an object for which images are acquired by the TDI sensor.
An illumination method comprising steps of:
- driving an optical member such that illumination light has a moving component that scans, in one direction, a visual field region that is a region extending in the one direction on a sample;
- and
- causing the illumination light having the moving component in the one direction to scan in synchronization with an integration cycle of a TDI sensor that receives light from the visual field region illuminated by the illumination light,
- wherein the sample is an object for which images are acquired by the TDI sensor.
An illumination method comprising steps of:
- driving an optical member such that illumination light has a moving component that scans, in one direction, a visual field region that is a region extending in the one direction on a sample;
- and
- causing the illumination light to scan more than a predetermined number of times in the one direction in one cycle of an integration cycle of the TDI sensor that receives light from the visual field region illuminated by the illumination light,
- wherein the sample is an object for which images are acquired by the TDI sensor.
Dependencies are inferred from the claim text.