Optical device
AssigneeMitutoyo Corporation
InventorKeiji Murata
Life of this patent
Estimating the term…
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AssigneeMitutoyo Corporation
InventorKeiji Murata
Estimating the term…
An optical device comprises: an image forming lens; an objective lens; an imaging device; a beam splitter; a coaxial epi-illumination optical system; and an optical damper having a damper surface. The beam splitter, the image forming lens, and the imaging device are arranged along an optical axis of the objective lens. An optical axis of the coaxial epi-illumination optical system is perpendicular to the optical axis of the objective lens. The beam splitter and the optical damper are arranged along the optical axis of the coaxial epi-illumination optical system. A normal direction of the damper surface is perpendicular to the optical axis of the objective lens and inclines with respect to the optical axis of the coaxial epi-illumination optical system without being perpendicular to the optical axis of the coaxial epi-illumination optical system.
An optical device comprising:
An optical device comprising:
Dependencies are inferred from the claim text.