Probe card

Abstract

[Problem] The objective is to provide a probe card that are less prone to contact failure, with good high-frequency characteristics, current endurance, and good conductivity. [Solution] A probe card includes a wiring board 10 formed with one or more probe electrodes 102, an upper guide plate 13 spaced below the wiring board 10 and facing the wiring board 10, formed with one or more upper guide holes 131, a lower guide plate 14 spaced below the upper guide plate 13 and facing the upper guide plate 13, formed with one or more lower guide holes 141, and a probe group 15G including two or more probes 15 that are inserted through a same upper guide hole 131 and a same lower guide hole 141 and connected to a same probe electrode 102 and a same electrode 201 of an object to be inspected, wherein the probes 15 of the probe group 15G are capable of independently each other buckling deformation between the upper guide plate 13 and the lower guide plate 14, and their lower ends are capable of moving independently each other in a vertical direction.

Dependencies are inferred from the claim text.