Physical quantity sensor and inertial measurement unit

A physical quantity sensor for detecting, when directions orthogonal to one another are defined as a first direction, a second direction, and a third direction, a physical quantity in the third direction, the physical quantity sensor comprising:

• an anchor fixed to a substrate;
• a support beam having one end coupled to the anchor and extending in the first direction;
• a fixed electrode unit provided on the substrate;
• a frame unit connected to the other end of the support beam;
• a movable electrode unit connected to the frame unit;
• and
• a damper unit connected to the frame unit and configured to damp a rotational vibration of the frame unit about the third direction as a rotation axis,
• wherein the fixed electrode unit includes fixed electrode comb teeth extending in the first direction,
• the movable electrode unit includes movable electrode comb teeth extending in the first direction and facing the fixed electrode comb teeth, the frame unit includes:
• a first portion having one end connected to the other end of the support beam and extending in the second direction;
• and
• a second portion having one end connected to the other end of the first portion and extending in the first direction,
• the damper unit includes a damper anchor and a damper movable unit, wherein the damper movable unit limits a rotational motion of the frame unit about the third direction by colliding with the damper anchor,
• the damper anchor includes damper fixed comb teeth extending along the second direction and fixed to the substrate,
• the damper movable unit includes damper movable comb teeth extending along the second direction and facing the damper fixed comb teeth,
• a thickness along the third direction of each of the damper fixed comb teeth is the same as a thickness along the third direction of each of the damper movable comb teeth,
• the damper unit is disposed in an area of a side to which the support beam is connected to the first portion of the frame unit when viewed in a plan view from the third direction,
• the damper anchor is indirectly connected to an outer edge of the first portion of the frame unit on the side to which the support beam is connected,
• the damper unit is rectangular-shaped and has four sides in the plan view, and the four sides include first, second, and third sides,
• both ends of the first side are connected to the second and third sides, respectively,
• an entirety of the first side is directly adjacent to an inner side of the frame unit in the plan view,
• an entirety of the second side is directly adjacent to the fixed electrode unit in the plan view, and
• an entirety of the third side is directly adjacent to the support beam in the plan view.