Resistance measuring apparatus and resistance measuring method based on the same
AssigneeSemes Co., Ltd.
InventorKiryong Lee
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Abstract
A method of measuring resistance of a specimen including a specimen electrode includes forming a center electrode and an edge electrode in at least a partial region on an upper surface of the specimen, transmitting, by a power supply, current to the specimen electrode, the center electrode, and the edge electrode, measuring, by an ammeter, the current flowing between the specimen electrode and the center electrode, and removing the center electrode and the edge electrode from the upper surface of the specimen.
Claims20
A method of measuring resistance of a specimen comprising a specimen electrode embedded within the specimen electrode, the method comprising:
- forming a center electrode and an edge electrode in at least a partial region on an upper surface of the specimen;
- transmitting, by a power supply, current to the specimen electrode, the center electrode, and the edge electrode;
- measuring, by an ammeter, the current flowing between the specimen electrode and the center electrode;
- and
- a step of removing electrodes from the specimen comprising removing only the center electrode and the edge electrode from the upper surface of the specimen without removing the specimen electrode from the specimen.
A resistance measuring apparatus of a specimen comprising a specimen electrode embedded within the specimen, the resistance measuring apparatus comprising:
- a center electrode and an edge electrode configured to be detachable from an upper surface of the specimen;
- a power supply configured to supply power to the specimen electrode, the center electrode, and the edge electrode;
- and
- an ammeter configured to measure current between the specimen, the specimen electrode embedded within the specimen, and the center electrode,
- wherein the edge electrode is spaced apart from the center electrode and surrounds the center electrode.
A resistance measuring apparatus of a ceramic specimen comprising a specimen electrode embedded within the specimen, the resistance measuring apparatus comprising:
- a center electrode and an edge electrode configured to be detachable from an upper surface of the specimen and formed by applying a liquid electrode in a spray manner, wherein, when attached to the upper surface of the specimen, electrode materials making up the center electrode and the edge electrode are in direct contact with the upper surface of the specimen;
- a power supply configured to supply power to the specimen electrode, the center electrode, and the edge electrode;
- and
- an ammeter configured to measure current between the specimen and the center electrode,
- wherein the ceramic specimen comprises a ceramic electrostatic chuck or a ceramic heater,
- an area of an upper surface of the center electrode is smaller than an area of the upper surface of the specimen, and
- the edge electrode is spaced apart from the center electrode and surrounds the center electrode.
Dependencies are inferred from the claim text.