X-ray spectrum analysis apparatus and method

An X-ray spectrum analysis method for analyzing a first X-ray spectrum comprising a waveform of interest, wherein

• the first X-ray spectrum is generated based on a detection signal acquired through detection of a characteristic X-ray emitted from a sample comprising a primary element which is known and a secondary element which is known,
• the waveform of interest is an intrinsic waveform of the primary element, caused by transition of electrons from a valence band to an inner shell in the primary element,
• a form of the waveform of interest changes according to a content of the secondary element in the sample, and p1 the X-ray spectrum analysis method comprises:
• comparing the waveform of interest with a reference waveform;
• determining an amount of shift as a result of the comparison between the waveform of interest and the reference waveform;
• and
• calculating the content of the secondary element based on the amount of shift,
• wherein the reference waveform is a waveform included in a second X-ray spectrum generated based on a detection signal acquired through detection of a characteristic X-ray emitted from a reference sample, and is an intrinsic waveform of the primary element in the reference sample, caused by transition of electrons from the valence band to the inner shell in the primary element,
• the reference sample does not include the secondary element,
• each of the first X-ray spectrum and the second X-ray spectrum is a spectrum of a soft X-ray having an energy of less than 100 eV, and
• a content ratio of the secondary element in the sample is 1% or less.

A non-transitory recording medium storing a program executed by an information processing device, the program, when executed, causing the information processing device to execute a process comprising:

• generating a first X-ray spectrum comprising a waveform of interest which is an intrinsic waveform of a primary element, caused by transition of electrons from a valence band to an inner shell in the primary element, based on a detection signal acquired through detection of a characteristic X-ray emitted from a sample including the primary element and a secondary element;
• and
• generating quantitative information of the secondary element by comparing the waveform of interest with a reference waveform, determining an amount of shift as a result of the comparison between the waveform of interest and the reference waveform, and calculating the quantitative information of the secondary element based on the amount of shift,
• wherein the reference waveform is a waveform included in a second X-ray spectrum generated based on a detection signal acquired through detection of a characteristic X-ray emitted from a reference sample, and is an intrinsic waveform of the primary element in the reference sample, caused by transition of electrons from the valence band to the inner shell in the primary element,
• the reference sample does not include the secondary element,
• each of the first X-ray spectrum and the second X-ray spectrum is a spectrum of a soft X-ray having an energy of less than 100 eV, and
• a content ratio of the secondary element in the sample is 1% or less.