Imaging optical arrangement to image an object illuminated by X-rays
AssigneesCarl Zeiss SMT GmbH, Carl Zeiss X-ray Microscopy, Inc.
InventorsJohannes Ruoff, Juan Atkinson Mora, Thomas Anthony Case, Heiko Feldmann, Christoph Hilmar Graf vom Hagen, Thomas Matthew Gregorich, Gerhard Krampert
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