Electromagnetic wave measuring apparatus, method, and recording medium
AssigneeAdvantest Corporation
InventorsTakao Sakurai, Nobutaka Takahashi, Yoshinori Kikuchi
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AssigneeAdvantest Corporation
InventorsTakao Sakurai, Nobutaka Takahashi, Yoshinori Kikuchi
Estimating the term…
An electromagnetic wave measuring apparatus irradiates an irradiation target having a measuring target with a pre-irradiation electromagnetic wave and, based on a post-irradiation electromagnetic wave obtained, measures the measuring target. The post-irradiation electromagnetic wave has a response component from the measuring target and a background component corresponding to the pre-irradiation electromagnetic wave. The electromagnetic wave measuring apparatus includes a first frequency spectrum acquiring section, a second frequency spectrum acquiring section, and a subtracting section. The first frequency spectrum acquiring section acquires a frequency spectrum of a first signal that includes the background component and the response component of the post-irradiation electromagnetic wave. The second frequency spectrum acquiring section acquires a frequency spectrum of a second signal that includes the background component of the post-irradiation electromagnetic wave. The subtracting section subtracts the frequency spectrum of the second signal from the frequency spectrum of the first signal.
An electromagnetic wave measuring apparatus arranged to irradiate an irradiation target having a measuring target with a pre-irradiation electromagnetic wave and, based on a post-irradiation electromagnetic wave obtained, measure the measuring target, in which
An electromagnetic wave measuring method for irradiating an irradiation target having a measuring target with a pre-irradiation electromagnetic wave and, based on a post-irradiation electromagnetic wave obtained, measuring the measuring target, in which
A non-transitory computer-readable medium including a program of instructions for execution by a computer to perform an electromagnetic wave measuring process for irradiating an irradiation target having a measuring target with a pre-irradiation electromagnetic wave and, based on a post-irradiation electromagnetic wave obtained, measuring the measuring target, in which
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