Capacitive MEMS sensing diagnostic mode
AssigneeInfineon Technologies AG
InventorsPhilipp Greiner, Elmar Rudolf Bach, Stefan Gansinger, Markus Haberler
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AssigneeInfineon Technologies AG
InventorsPhilipp Greiner, Elmar Rudolf Bach, Stefan Gansinger, Markus Haberler
Estimating the term…
A pressure sensor includes a microelectromechanical system (MEMS) device having a first pressure sensitive capacitor element, a second pressure sensitive capacitor element, a first reference capacitive element, and a second reference capacitive element arranged in a bridge configuration, a first output pad, and a second output pad; and an application-specific integrated circuit (ASIC) in electrical communication with the MEMS device having a first input pad and a second input pad, a measurement interface including a first input and a second input, a first switch coupled between the first input pad and the second input pad, and a second switch coupled between the second input of the measurement interface and the second input pad of the ASIC.
A pressure sensor comprising:
A pressure sensor comprising:
A pressure sensor comprising:
Dependencies are inferred from the claim text.