Radiation temperature measurement device and radiation temperature measurement method
AssigneeHoriba, Ltd.
InventorsSho Fujino, Koji Tominaga
Life of this patent
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Abstract
There is provided a radiation temperature measurement device that accurately measures a temperature of an object being measured, and that includes two infrared detection units that detect mutually different infrared wavelength bands, a spectral characteristics data storage unit that stores spectral characteristics data showing a transmittance and a reflectance of each of the objects being measured, and a temperature calculation unit that, based on infrared ray quantities detected by each of the two infrared detection units, and on the transmittance and reflectance of each of the objects being measured, calculates the temperature of each of the objects being measured.
Claims6
A radiation temperature measurement device that measures a temperature of an object being measured, comprising:
- two infrared detection units that are provided at a processing chamber configured for processing the object being measured, and that detect infrared ray quantities in mutually different infrared wavelength bands;
- a spectral characteristics measurement unit that is provided at a spectral characteristics measurement chamber that is different from the processing chamber, and that measures a transmittance and a reflectance of the object being measured;
- a spectral characteristics data storage unit that stores spectral characteristics data that indicates the transmittance and the reflectance obtained by the spectral characteristics measurement unit;
- and
- a temperature calculation unit that, based on the infrared ray quantities detected by each of the two infrared detection units and on the transmittance and the reflectance of the object being measured, calculates the temperature of the object being measured.
A radiation temperature measurement method for measuring a temperature of an object being measured, comprising:
- detecting, by two infrared detection units that are provided at a processing chamber configured for processing the object being measured, infrared ray quantities in mutually different infrared wavelength bands;
- measuring, by a spectral characteristics measurement unit that is provided at a spectral characteristics measurement chamber that is different from the processing chamber, a transmittance and a reflectance of the object being measured;
- and
- calculating, by a temperature calculation unit, the temperature of the object being measured based on the infrared ray quantities detected by each of the two infrared detection units and on the transmittance and the reflectance of the object being measured.
Dependencies are inferred from the claim text.