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US 12,624,949 B2Granted
Manufacturing method for electronic device and electronic device
AssigneeSeiko Epson Corporation
InventorTakeru Sakaide
Life of this patent
Estimating the term…
Abstract
A manufacturing method for an electronic device includes a housing step of housing a vibrator element in a housing space formed by a substrate and a lid member, and an adjustment step of adjusting a resonance frequency of the lid member by removing a part of the lid member. The method further includes an inspection step of determining whether to perform the adjustment step. At the inspection step, performing the adjustment step is determined when the resonance frequency of the lid member is within a vibration frequency band of the vibrator element. At the adjustment step, a part of the lid member is removed by laser cutting.
Claims6
A manufacturing method for an electronic device comprising:
- a housing step of housing an angular velocity sensor in a housing space formed by a substrate and a lid member, the angular velocity sensor having a vibration frequency, the lid member having a plurality of target removal regions, the plurality of target removal regions including a first region and a second region different from the first region, the first region including a center of the lid member in a plan view;
- a first inspection step of inspecting whether an initial resonance frequency of the lid member is within a predetermined vibration frequency range including the vibration frequency;
- a first adjustment step of adjusting the initial resonance frequency of the lid member by removing a part of the first region of the lid member when the initial resonance frequency of the lid member is within the predetermined vibration frequency range;
- a second inspection step of inspecting whether a first post-adjusted resonance frequency of the lid member is within the predetermined vibration frequency range after the part of the first region of the lid member is removed;
- and
- a second adjustment step of adjusting the first post-adjusted resonance frequency of the lid member by removing a part of the second region of the lid member when the first post-adjusted resonance frequency of the lid member is within the predetermined vibration frequency range,
- wherein the angular velocity sensor has a package and a vibrator element housed in the package,
- the package has a recessed portion and includes a box-shaped base supporting the vibrator element housed in the recessed portion, and a lid joined to the box-shaped base to close an opening of the recessed portion, and
- the vibrator element includes:
- a base portion located in a center part of the vibrator element;
- a pair of detection vibration arms extending from the base portion toward first both sides of the vibrator element, respectively;
- a pair of supporting arms extending from the base portion toward second both sides of the vibrator element;
- a first pair of drive vibration arms extending from an end of one supporting arm of the pair of supporting arms toward the first both sides;
- and
- a second pair of drive vibration arms extending from an end of the other supporting arm of the pair of supporting arms toward the first both sides.
12 more elements
An electronic device comprising:
- a substrate;
- an electronic component mounted on the substrate and including an angular velocity sensor, the angular velocity sensor having a package and a vibrator element housed in the package;
- and
- a lid member mounted on the substrate and covering the electronic component, wherein
- the lid member has a plurality of target removal regions thereon as a frequency adjustment mark formed by removal of a part thereof and being thinner than a surrounding portion,
- the package has a recessed portion and includes a box-shaped base supporting the vibrator element housed in the recessed portion, and a lid joined to the box-shaped base to close an opening of the recessed portion, and
- the vibrator element includes:
- a base portion located in a center part of the vibrator element;
- a pair of detection vibration arms extending from the base portion toward first both sides of the vibrator element, respectively;
- a pair of supporting arms extending from the base portion toward second both sides of the vibrator element;
- a first pair of drive vibration arms extending from an end of one supporting arm of the pair of supporting arms toward the first both sides;
- and
- a second pair of drive vibration arms extending from an end of the other supporting arm of the pair of supporting arms toward the first both sides.
10 more elements
Dependencies are inferred from the claim text.