US 12,624,770 B2 · Gas panel enclosure

Abstract

Disclosed herein is a gas panel enclosure including a divider plate for separating various components of the gas panel. In one example, a gas panel assembly may include an enclosure defining first, second, and third chambers, wherein the first and third chambers are separated from the second chamber by a divider, wherein the first chamber is connected to an exhaust, and wherein the divider comprises openings permitting fluid flow between the second and first chambers. The assembly may include electrical components within the third chamber, wherein the third and first chambers are separated by an internal wall. The gas panel assembly may further include a gas sticks within the second chamber, wherein the electrical components are separated from the gas stick assembly by the divider and by the internal wall to prevent fluid flow from the second chamber to the third chamber.

Claims20

Dependent claims

A gas panel assembly, comprising:

an enclosure defining a first chamber, a second chamber, and a third chamber, wherein the first and third chambers are separated from the second chamber by a divider, wherein the first chamber is connected to an exhaust, and wherein the divider comprises a first plurality of openings permitting fluid flow between the second chamber and the first chamber;
a plurality of electrical components within the third chamber, wherein the third chamber is separated from the first chamber by an internal wall;
and
a gas stick assembly within the second chamber, wherein the plurality of electrical components is operable to control gas flow from the gas stick assembly to a substrate processing chamber, and wherein the plurality of electrical components is separated from the gas stick assembly by the divider and by the internal wall to prevent fluid flow from the second chamber to the third chamber.

1 more element

A gas panel assembly of a semiconductor processing system, the gas panel assembly comprising:

an enclosure defining a first chamber, a second chamber, and a third chamber, wherein the first and third chambers are separated from the second chamber by a divider, wherein the first chamber is connected to an exhaust, and wherein the divider comprises a first plurality of openings permitting fluid flow between the second chamber and the first chamber;
a plurality of electrical components within the third chamber, wherein the third chamber is separated from the first chamber by an internal wall;
and
a gas stick assembly within the second chamber, wherein the plurality of electrical components is operable to control gas flow from the gas stick assembly to a substrate processing chamber, and wherein the plurality of electrical components is separated from the gas stick assembly by the divider and by the internal wall to prevent fluid flow from the second chamber to the third chamber.

1 more element

An apparatus for delivering gases to a substrate processing chamber, the apparatus comprising:

an enclosure defining a first chamber, a second chamber, and a third chamber, wherein the first and third chambers are separated from the second chamber by a divider, wherein the third chamber is separated from the first chamber by an internal wall, wherein the first chamber is connected to an exhaust, and wherein the divider comprises a first plurality of openings permitting fluid flow between the second chamber and the exhaust;
and
a plurality of electrical components within the third chamber and a gas stick assembly within the second chamber, wherein the plurality of electrical components is operable to control gas flow from the gas stick assembly to the substrate processing chamber, and wherein the plurality of electrical components is separated from the gas stick assembly by the divider and by the internal wall to prevent fluid flow from the second chamber to the third chamber.

Dependencies are inferred from the claim text.

Gas panel enclosure

Life of this patent

Gas panel enclosure

Life of this patent

Abstract

Claims20