Atomic layer deposition apparatus

An atomic layer deposition apparatus for processing substrates, the apparatus comprising:

• a reactor configured for atomic layer deposition, the reactor defining an opening to a deposition space within the reactor, the reactor comprising at least one side wall, an end edge, and a flange structure protruding from the at least one side wall of the reactor away from the deposition space, the flange structure being provided at the end edge of the reactor;
• and
• a reactor door configured to open and close the opening of the reactor, the reactor door being arranged against the flange structure in a closed position of the reactor, the reactor door including at least one radiation shield plate disposed on an inner side of the reactor door facing toward the deposition space for limiting an amount of excess heat that enters the reactor door from within the reactor,
• the apparatus further comprises a cooling arrangement for cooling the reactor door, the cooling arrangement comprising:
• a shell structure surrounding an exterior of the reactor such that a cooling channel is formed between the shell structure and the at least one side wall of the reactor;
• a heat exchanger element arranged in the cooling channel adjacent the end edge, the heat exchanger element having at least one air intake that provides fluid communication between an exterior of the apparatus and the cooling channel, a portion of the heat exchanger element being in contact with the flange structure to form a heat transfer connection with the flange structure for cooling the reactor door arranged against the flange structure;
• a ventilation discharge connection fluidly connected to the cooling channel, the ventilation discharge connection being provided at a distance from the end edge of the reactor for discharging gas entering through the at least one air intake of the heat exchanger element;
• and
• a collar arranged around the reactor adjacent the end edge, the collar comprising:
• a wall portion protruding away from the shell structure in a transverse direction with respect to the at least one side wall of the reactor;
• and
• a collar portion extending from the wall portion toward the end edge of the reactor, the collar portion being arranged to form together with the end edge of the reactor an opening to the cooling channel;
• wherein the cooling channel extends from the opening along the collar portion toward the wall portion of the collar, continues along the wall portion toward the at least one side wall of the reactor, and further extends between the shell structure and the at least one side wall of the reactor to the ventilation discharge connection.