Methods for providing a precursor mixture to a reaction chamber

A method of providing a first precursor and a second precursor to a reaction chamber, the method comprising:

• providing a precursor module comprising a first precursor vessel comprising a first precursor, a second precursor vessel comprising a second precursor, and a mixing chamber comprising a mixing valve on an exhaust port of the mixing chamber;
• maintaining the first precursor in the first precursor vessel at a first precursor temperature;
• maintaining the second precursor in the second precursor vessel at a second precursor temperature;
• providing a first fluid connection between the first precursor vessel and the mixing chamber;
• providing a second fluid connection between the second precursor vessel and the mixing chamber;
• providing a third fluid connection between the mixing chamber and the reaction chamber that is separate from the mixing chamber;
• controlling, by a controller, the first precursor temperature and the second precursor temperature, wherein the first precursor and the second precursor are provided separately to the mixing chamber, and wherein providing the first precursor and the second precursor separately to the mixing chamber comprises:
• first providing a first pre-determined quantity of the first precursor to the mixing chamber;
• and
• after providing the first pre-determined quantity of the first precursor, providing a second pre-determined quantity of the second precursor to the mixing chamber;
• forming a precursor mixture, in the mixing chamber, by mixing the first pre-determined quantity of the first precursor and the second pre-determined quantity of the second precursor;
• and
• opening the mixing valve on the exhaust port of the mixing chamber;
• providing, based on the opening, the precursor mixture to the reaction chamber.