Glass composition, glass article and use thereof

A glass article, comprising, a glass composition comprising oxides which form non-volatile fluorides at a temperature of 150° C. and a pressure of 5 Pa or less and are present in an amount of less than 0.5 mol % in the glass composition, based on all oxides present in the glass composition, wherein a working point of the glass composition is 1400° C. or less, wherein the glass composition has a hydrolytic resistance characterized by a leachability of GeO2, P2O5 and/or B2O3 from the glass composition determined as concentrations in an eluate prepared according to ISO 719 of at least one of the following:

• less than 70 mg/l GeO2 in the eluate per 1 mol % GeO2 in the glass composition;
• less than 70 mg/l P2O5 in the eluate per 1 mol % P2O5 in the glass composition;
• or
• less than 300 mg/l B2O3 in the eluate per 1 mol % B2O3 in the glass composition;
• wherein the glass article is at least one of the following:
• formed as a sheet, a plate, a bar, and/or a flat glass;
• a surface-structured and/or etched wafer, a surface-structured and/or etched optical wafer, and/or a glass waveguide panel;
• a substrate glass for a radio-frequency microelectromechanical system;
• or
• an article structured via reactive ion etching.

A glass composition, comprising oxides which form non-volatile fluorides at a temperature of 150° C. and a pressure of 5 Pa or less and are present in an amount of less than 0.5 mol % in the glass composition, based on all oxides present in the glass composition, wherein a working point of the glass composition is 1400° C. or less, wherein the glass composition has a hydrolytic resistance characterized by a leachability of GeO2, P2O5 and/or B2O3 from the glass composition determined as concentrations in an eluate prepared according to ISO 719 of at least one of the following:

• less than 70 mg/l GeO2 in the eluate per 1 mol % GeO2 in the glass composition;
• less than 70 mg/l P2O5 in the eluate per 1 mol % P2O5 in the glass composition;
• or
• less than 300 mg/l B2O3 in the eluate per 1 mol % B2O3 in the glass composition;
• wherein the glass composition comprises, based on all oxides present in the glass composition:
• 10 to 55 mol % SiO2;
• 5 to 30 mol % B2O3;
• and
• 5 to 30 mol % P2O5;
• wherein a sum of B2O3, P2O5, GeO2, TiO2 and Nb2O5 is at least 35 mol and a sum of B2O3 and P2O5 is less than 35 mol %.