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US 12,623,255 B2Granted
Substrate cleaning device and substrate cleaning method
AssigneeSamsung Electronics Co., Ltd.
InventorsDonghoon Kwon, Juhyun Lee, Chungki Min
Life of this patent
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Abstract
A substrate cleaning apparatus may include a first roll member and a second roll member including a copolymer of a first water-soluble polymer and a second water-soluble polymer. The first roll member may include a first roll body extending in a first direction and first protrusions on a surface of the first roll body. The second roll member may include a second roll body extending in the first direction and second protrusions on a surface of the second roll body.
Claims13
A substrate cleaning apparatus, comprising:
- a first roll member including a first roll body extending in a first direction and first protrusions on a surface of the first roll body;
- and
- a second roll member including a second roll body extending in the first direction and second protrusions on a surface of the second roll body, wherein the first roll member and the second roll member each include a copolymer of a first water-soluble polymer and a second water-soluble polymer, wherein
- the second water-soluble polymer comprises a cationic polymer, and
- the cationic polymer comprises at least one of polyvinylamine, polyethyleneimine, polyvinylimidazole, and polyallylamine.
2 more elements
A substrate cleaning apparatus, comprising:
- a first roll member including a first roll body extending in a first direction and first protrusions on a surface of the first roll body;
- a second roll member including a second roll body extending in the first direction and second protrusions on a surface of the second roll body;
- and
- a cleaning solution supply nozzle, wherein
- the cleaning solution supply nozzle is configured to supply a cleaning solution to a lower surface of a substrate or an upper surface of the substrate when the substrate is positioned between the first roll member and the second roll member, and
- the first roll member and the second roll member each include a copolymer of polyvinyl alcohol and polyvinylamine.
3 more elements
Dependencies are inferred from the claim text.