Chain-type roller coating apparatus and use thereof

A chain-type roller coating apparatus, comprising a roller bed configured to convey a silicon wafer and a liquid coating roller horizontally arranged and configured for roller-coating a dopant source onto the silicon wafer on the roller bed, wherein the roller bed comprises a plurality of conveying rollers arranged sequentially along a conveying direction of the roller bed and a transmission mechanism configured to drive the plurality of conveying rollers to rotate;

• the plurality of conveying rollers are horizontally arranged and parallel to each other;
• the liquid coating roller is parallel to the plurality of conveying rollers;
• the liquid coating roller is equipped with a synchronizing wheel configured to drive the liquid coating roller to rotate, the synchronizing wheel is located on an outer side of an axial end of the liquid coating roller, an axis of the synchronizing wheel is parallel to an axis of the liquid coating roller, and the axis of the synchronizing wheel and the axis of the liquid coating roller are located in an identical vertical plane;
• the synchronizing wheel is equipped with a driving mechanism configured to drive the synchronizing wheel to rotate;
• the synchronizing wheel is further provided with a mounting hole, the mounting hole is a straight elongated hole, the mounting hole extends along a radial direction of the synchronizing wheel, and the mounting hole extends across the axis of the synchronizing wheel;
• a proximity switch is further arranged on an outer side of the synchronizing wheel, and the proximity switch and the axis of the synchronizing wheel are located in an identical vertical plane;
• the synchronizing wheel is further provided with a trigger element which is configured to be sensed by the proximity switch, the trigger element is located outside the mounting hole, and the trigger element and the mounting hole are located on an identical straight line;
• the trigger element is configured to rotate with the synchronizing wheel, and when the trigger element is rotated to a position in which the trigger element is sensed by the proximity switch, the trigger element and the axis of the synchronizing wheel are located in an identical vertical plane;
• the liquid coating roller is assembled with the synchronizing wheel by a connecting shaft;
• the connecting shaft comprises a shaft main body which is connected to the liquid coating roller and coaxial with the liquid coating roller, and a shaft protrusion portion which extends from an end of the shaft main body away from the liquid coating roller and is inserted into the mounting hole;
• the shaft protrusion portion is slidably engaged with the mounting hole;
• the shaft main body of the connecting shaft is equipped with a rotation support device configured to support a rotation of the shaft main body, and the rotation support device is located between the liquid coating roller and the synchronizing wheel;
• the rotation support device is equipped with a first lifting driving device configured to drive the rotation support device to ascend or descend vertically;
• and a ranging sensor is arranged exactly above the liquid coating roller.