Pressure sensor
AssigneeImperial College Innovations Limited
InventorsMohammad Reza Bahmanyar, Longfang Zou
Life of this patent
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Abstract
A pressure sensing apparatus comprises an elongate first sensor device in a beam configuration supported at at least one longitudinal end by a rigid support structure and having a deflectable portion. A chamber is disposed adjacent a first, internally-facing, face of the first sensor device. An envelope hermetically seals the first sensor device and the chamber from an ambient environment external to the pressure sensing apparatus. The envelope comprises a flexible membrane disposed over and coupled to a second, externally-facing, face of the first sensor device and extending along at least one or two sides of the first sensor device and the chamber. The sensor device may be a surface acoustic wave device coupled to an RF antenna.
Claims20
A pressure sensing apparatus comprising:
- an elongate first sensor device in a beam configuration supported at at least one longitudinal end by a rigid support structure and having a deflectable portion;
- a chamber disposed adjacent a first face of the first sensor device;
- an envelope hermetically sealing the first sensor device and the chamber from an ambient environment;
- the envelope comprising a flexible membrane disposed over and coupled to a second face of the first sensor device and extending along at least one or two sides of the first sensor device and the chamber, in which the rigid support structure comprises a housing having a trench within which the first sensor device is positioned, and the flexible membrane comprises a polymer which encapsulates the housing to form the envelope, in which the housing comprises first and second electrically conductive portions separated from one another by an electrically insulating portion, each electrically conductive portion coupled to a respective electrical terminal of the first sensor device, and in which the first electrically conductive portion of the housing is substantially longer than the second electrically conductive portion to form a ground plane, and the second electrically conductive portion of the housing is coupled to an antenna.
Dependencies are inferred from the claim text.