Method for assembling EIC to PIC to build an optical engine
AssigneeAvago Technologies International Sales Pte. Limited
InventorsSukeshwar Kannan, Near Margalit, Vivek Raghuraman, Vivek Raghunathan
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AssigneeAvago Technologies International Sales Pte. Limited
InventorsSukeshwar Kannan, Near Margalit, Vivek Raghuraman, Vivek Raghunathan
Estimating the term…
The current invention offers a method for preparing an electronic integrated circuit (EIC) for the assembly of an optical engine. The method involves stacking a CMOS-based EIC wafer onto a short loop/interposer wafer through face-to-back bonding. This stacked configuration serves as a carrier for the thin CMOS wafers. Subsequently, the stacked wafers are thinned down to the desired height and undergo a via last process. In this process, the thick metal layer from the short loop/interposer wafer acts as an etch stop. The stacked EIC wafers can then be diced and attached to a photonic integrated circuit (PIC) wafer, resulting in the formation of an optical engine.
An integrated circuit comprising:
Dependencies are inferred from the claim text.