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US 12,622,175 B2Granted
Piezoelectric sensor with embedded electrodes
AssigneeJoanneum Research Forschungsgesellschaft mbH
InventorsBarbara Stadlober, Martin Zirkl, Philipp Schaffner, Andreas Tschepp
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Abstract
A piezoelectric sensor, comprising at least one first electrode, at least one second electrode, and a piezoelectric material, wherein the piezoelectric material has an anisotropic electromechanical coupling and the at least one first and second electrodes are at least in part embedded in the piezoelectric material, the piezoelectric material having a first surface wherein the electrodes extend vertically within the piezoelectric material from the first surface.
Claims16
A piezoelectric sensor (1), comprising:
- at least one first electrode (3) having transversely-disposed first and second surfaces;
- at least one second electrode (5) having transversely-disposed third and fourth surfaces;
- a piezoelectric material (6);
- wherein
- the piezoelectric material (6) has an anisotropic electromechanical coupling, and
- the at least one first and second electrodes (3,5) are at least in part embedded in the piezoelectric material (6) so that the first and second surfaces of the at least one first electrode (3) and the third and fourth surfaces of the at least one second electrode (5) are in contact with the piezoelectric material (6), the piezoelectric material (6) having a first surface (4), wherein the at least one first and second electrodes (3,5) extend substantially at a right angle within the piezoelectric material (6) from the first surface (4).
3 more elements
Dependencies are inferred from the claim text.