Gas sensor
AssigneeAsahi Kasei Microdevices Corporation
InventorsToshiaki Fukunaka, Takaaki Furuya
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AssigneeAsahi Kasei Microdevices Corporation
InventorsToshiaki Fukunaka, Takaaki Furuya
Estimating the term…
Provided is a gas sensor that can suppress characteristic variation caused by deformation of a semiconductor substrate. The gas sensor (1) includes a substrate (redistribution layer 30), a light-emitting element (11) provided at a front surface (30a) or embedded in the substrate, a light-receiving element (12) that is provided at the front surface or embedded in the substrate and that receives light emitted from the light-emitting element, and a plurality of external connection terminals (40) at a rear surface (30b) that is an opposite surface to the front surface of the substrate. At least a portion of the plurality of external connection terminals is electrically connected to the light-emitting element and the light-receiving element. The plurality of external connection terminals is arranged such that, in plan view, the light-emitting element and the light-receiving element are not present on a line linking any two external connection terminals.
A gas sensor comprising:
A gas sensor comprising:
A gas sensor comprising:
Dependencies are inferred from the claim text.