Infrared sensor and method of manufacturing infrared sensor
AssigneeMitsubishi Electric Corporation
InventorsDaisuke Fujisawa, Takashi Takenaga
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AssigneeMitsubishi Electric Corporation
InventorsDaisuke Fujisawa, Takashi Takenaga
Estimating the term…
An infrared sensor includes a first semiconductor substrate, a second semiconductor substrate, a sealing frame, and a first connection. The first semiconductor substrate includes a first main surface and an infrared detection element. The second semiconductor substrate includes a second main surface and a signal processing circuit. The sealing frame surrounds an internal space with the first main surface, the infrared detection element, and the second main surface. The first connection electrically connects the infrared detection element and the signal processing circuit. The internal space is hermetically sealed by the first main surface, the infrared detection element, the second main surface, and the sealing frame. Each of the sealing frame and the first connection is sandwiched between the first main surface and the second main surface.
An infrared sensor comprising:
A method of manufacturing an infrared sensor, comprising the steps of:
An infrared sensor comprising:
Dependencies are inferred from the claim text.