Integration scheme for fabricating high precision, low capacitor with unlanded via

Abstract

Semiconductor devices including a capacitor and methods of fabricating the semiconductor devices are disclosed. A method of fabricating a semiconductor device including a capacitor includes forming an underlayer structure including a substrate onto which metal is patterned within a first dielectric material, wherein the patterned metal forms a first metal surface of the capacitor; forming a middle layer of a second dielectric material above the underlayer structure; forming an upper layer of a third dielectric material above the middle layer; etching a supervia though the upper layer and into the middle layer, wherein the supervia hangs in the second dielectric material of the middle layer above the patterned metal forming the first metal surface of the capacitor; and performing barrier deposition and metal electroplating in the supervia, wherein the supervia forms a second metal surface of the capacitor above the first metal surface.

Dependencies are inferred from the claim text.