Vibrator element, vibrator device, and method of manufacturing vibrator element

A method of manufacturing a vibrator element, comprising:

• a frequency adjustment method of adjusting a frequency of the vibrator element, wherein
• the vibrator element includes
• a base part,
• a vibrating arm which includes a first surface, a second surface at an opposite side to the first surface in a direction along a Z axis, a first side surface, a second side surface at an opposite side to the first side surface in a direction along an X axis perpendicular to the Z direction, and a third side surface located at an opposite side to the base part, and extends from the base part in a direction along a Y axis perpendicular to the Z axis and the X axis, and
• a first weight arranged on the second surface,
• each of the first side surface and the second side surface is configured by a first side surface part and a second side surface part that is directly contiguous with the first side surface part, and the first side surface part is tilted with respect to a direction along the Z axis, and the second side surface part is tilted toward the first surface or the second surface with respect to the first side surface part,
• the first side surface part of the first side surface and the first side surface part of the second side surface are directly contiguous with the second surface,
• when viewed from a direction along the Z axis the first weight is arranged such that an outer edge portion on the first side surface side is substantially aligned with the innermost portions of the first side surface part and the second side surface part of the first side surface, and an outer edge portion on the second side surface side is substantially aligned with the innermost portions of the first side surface part and the second side surface part of the second side surface, and
• the frequency adjustment method includes irradiating at least a part of the first weight with a laser beam from the first surface side in a direction along the Z axis to remove the at least a part of the first weight to thereby change an oscillation frequency of the vibrator element.