Control device, control system, method for operating a control system
AssigneeCarl Zeiss SMT GmbH
InventorsArian Kriesch, Matthias Manger, Claudius Weimann, Ulrich Vogl
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AssigneeCarl Zeiss SMT GmbH
InventorsArian Kriesch, Matthias Manger, Claudius Weimann, Ulrich Vogl
Estimating the term…
A control system for frequency control of a laser module, comprising at least one laser module for generating laser radiation, at least one control device coupled or configured to couple to the laser module, and at least one optical resonator coupled or configured to couple to the control device, wherein the control device comprises a semiconductor substrate, a first Pound-Drever-Hall system arranged on the semiconductor substrate and at least one second Pound-Drever-Hall system arranged on the semiconductor substrate, wherein the laser module is coupled to the first Pound-Drever-Hall system of the control device and is configured to couple to the at least second Pound-Drever-Hall system of the control device, wherein the first Pound-Drever-Hall system is coupled to the optical resonator and wherein the second Pound-Drever-Hall system is configured to couple to the optical resonator, and wherein the number of Pound-Drever-Hall systems is greater than the number of laser modules or optical resonators.
A control system for frequency control of a laser module, comprising:
A method for operating a control system, comprising:
A method for carrying out frequency control for a laser module of a control system, the control system comprising at least one laser module for generating laser radiation;
Dependencies are inferred from the claim text.