Clamp for holding an object and method
AssigneeASML Netherlands B.V.
InventorsThomas Poiesz, René Adrianus Van Rooij, Alexander Stein
Life of this patent
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Abstract
The disclosure provides a clamp comprising a dielectric member; a conductive element disposed on the dielectric member and comprised of a first conductive material; and a number of burls arranged on the conductive element for supporting the object, each burl comprising a second conductive material, wherein the clamp comprises a stack of alternating layers of etch resistant material and a third conductive material arranged between the conductive element and the number of burls.
Claims21
A clamp for holding an object, the clamp comprising:
- a plurality of burls arranged and configured to support the object, each burl comprising a first conductive material,
- wherein the plurality of burls is on top of a stack of alternating layers of a layer comprising etch resistant material and a layer comprising a second conductive material, the etch resistant material has a lower removal rate than the removal rate of the first conductive material when the plurality of burls is being removed, and wherein bottom parts of the plurality of burls are formed from the stack of alternating layers.
A method of making a clamp for holding an object, the method comprising the steps of:
- disposing a conductive element comprising a first conductive material on a dielectric member;
- arranging a number of burls, configured to support the object, on the conductive element, wherein each burl comprises a top part comprising a second conductive material and a bottom part comprising a stack of alternating layers of etch resistant material and a third conductive material.
A method of making a clamp for holding an object, the method comprising:
- arranging a number of burls for supporting the object, each burl comprising a first conductive material,
- wherein arranging the number of burls comprises:
- depositing a stack of alternating layers of a layer comprising etch resistant material and a layer comprising a second conductive material on top of an electrically conductive element,
- depositing the first conductive material on the stack;
- removing the first conductive material not covered by a mask and removing part of the stack not covered by the first conductive material to thereby form the burl from the first conductive material and a remaining part of the stack.
A method of refurbishing a clamp for holding an object, wherein the clamp comprises a plurality of burls, each burl comprising a first conductive material, on top of a stack of alternating layers of a layer comprising etch resistant material and a layer comprising a second conductive material, the stack is arranged above a dielectric member, the method comprising:
- removing the first conductive material of each of the plurality of burls to form an intermediate structure;
- depositing a layer comprising the first conductive material on the intermediate structure;
- depositing a layer comprising the etch resistant material on the layer of the first conductive material;
- patterning the layer comprising the etch resistant material for forming another plurality of burls;
- and
- removing the first conductive material by etching for forming the another plurality of burls;
- and removing the layer comprising the etch resistant material.
Dependencies are inferred from the claim text.