Method for producing actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method, method for producing electronic device, and method for producing onium salt
AssigneeFUJIFILM Corporation
InventorsTaro Miyoshi, Shuhei Yamaguchi
Life of this patent
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Abstract
A method for producing an actinic ray-sensitive or radiation-sensitive resin composition, the method including passing a solution including an acid compound having a pKa of 2.0 or more through a column packed with an ion-exchange resin, producing an onium salt by using the acid compound having been passed through the column, and mixing together the onium salt and a resin that undergoes an increase in polarity due to action of acid.
Claims15
A method for producing an actinic ray-sensitive or radiation-sensitive resin composition, the method comprising:
- passing a solution including an acid compound (CA) having a pKa of 2.0 or more, through a column packed with an ion-exchange resin;
- producing an onium salt (C) by using the acid compound (CA) having been passed through the column;
- and
- mixing together the onium salt (C) and a resin (A) that undergoes an increase in polarity due to action of acid.
A pattern forming method comprising
- forming a resist film on a substrate by an actinic ray-sensitive or radiation-sensitive resin composition produced by the following method for producing an actinic ray-sensitive or radiation-sensitive resin composition,
- exposing the resist film, and
- developing the exposed resist film by a developer,
- said method for producing an actinic ray-sensitive or radiation-sensitive resin composition comprising the following steps:
- passing a solution including an acid compound (CA) having a pKa of 2.0 or more, through a column packed with an ion-exchange resin;
- producing an onium salt (C) by using the acid compound (CA) having been passed through the column;
- and
- mixing together the onium salt (C) and a resin (A) that undergoes an increase in polarity due to action of acid.
A method for producing an onium salt, the method comprising:
- passing a solution including an acid compound (CA) having a pKa of 2.0 or more, through a column packed with an ion-exchange resin;
- and
- producing an onium salt (C) by using the acid compound (CA) having been passed through the column.
Dependencies are inferred from the claim text.