Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, pattern forming method, and method for manufacturing electronic device

An actinic ray-sensitive or radiation-sensitive resin composition comprising:

• (A) a resin having a group having a polarity that increases through decomposition by an action of an acid;
• (B) a compound represented by General Formula (b1), which generates an acid upon irradiation with actinic rays or radiation;
• and
• (C) a compound represented by General Formula (c1), which generates an acid upon irradiation with actinic rays or radiation,
• wherein a ratio of a content of the compound (C) to a content of the compound (B) is from 0.01% by mass to 10% by mass,
• in General Formula (b1), L represents a single bond or a divalent linking group,
• in a case where there are a plurality of L's, the plurality of L's may be the same as or different from each other,
• A represents a group that decomposes by an action of an acid,
• in a case where there are a plurality of A's, the plurality of A's may be the same as or different from each other,
• n represents an integer from 1 to 5,
• X represents an (n+1)-valent linking group, and
• M+ represents a sulfonium ion or an iodonium ion,
• in General Formula (c1), L represents a single bond or a divalent linking group,
• in a case where there are a plurality of L's, the plurality of L's may be the same as or different from each other,
• n represents an integer from 1 to 5,
• X represents an (n+1)-valent linking group,
• M+ represents a sulfonium ion or an iodonium ion,
• provided that L, n, X, and M+ in General Formula (c1) are the same as L, n, X, and M+ in General Formula (b1), respectively, and B in General Formula (c1) is different from A in General Formula (b1),
• B represents a group that decomposes by an action of an acid, a hydroxy group, or a carboxy group, and
• in a case where there are a plurality of B's, the plurality of B's may be the same as or different from each other,
• provided that at least one B represents the hydroxy group or the carboxy group,
• wherein the hydroxy group or the carboxy group of the at least one B in General Formula (c1) is disposed on a terminal site of the General Formula (c1).