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US 12,619,146 B2Granted
Actinic-ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device
AssigneeFUJIFILM Corporation
InventorsFumihiro Yoshino, Takamitsu Tomiga, Yuma Kurumisawa, Takumi Tanaka
Life of this patent
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Abstract
An actinic ray-sensitive or radiation-sensitive resin composition contains a resin (A) and a resin (B) which include a repeating unit having an acid-decomposable group, and the acid-decomposable group in the resin (A) and the acid-decomposable group in the resin (B) have the same structures. Regarding the resin (A) and the resin (B), |GA−GB| is from 5% by mole to 20% by mole, SA/SB is 10/90 to 90/10, |MwA−MwB| is from 100 to 5,000, and |MwA/MnA−MwB/MnB| is 0.05 or more.
Claims13
An actinic ray-sensitive or radiation-sensitive resin composition comprising:
- a resin (A) including a repeating unit having an acid-decomposable group;
- and
- a resin (B) including a repeating unit having an acid-decomposable group,
- wherein an absolute value |GA−GB| of a difference between a mole-based content ratio GA of the repeating unit having an acid-decomposable group in the resin (A) and a mole-based content ratio GB of the repeating unit having an acid-decomposable group in the resin (B) is from 5% by mole to 20% by mole,
- the acid-decomposable group in the resin (A) and the acid-decomposable group in the resin (B) have the same structures,
- a ratio SA/SB between a mass-based content ratio SA of the resin (A) to a mass-based content ratio SB of the resin (B) with respect to a total solid content in the actinic ray-sensitive or radiation-sensitive resin composition is 10/90 to 90/10,
- an absolute value |MwA−MwB| of a difference between a weight-average molecular weight MwA of the resin (A) and a weight-average molecular weight MwB of the resin (B) is from 1,000 to 5,000,
- an absolute value |MwA/MnA−MwB/MnB| of a difference between a molecular weight distribution MwA/MnA of the resin (A), which is a value obtained by dividing MwA by a number-average molecular weight MnA of the resin (A), and a molecular weight distribution MwB/MnB of the resin (B), which is a value obtained by dividing MwB by a number-average molecular weight MnB of the resin (B), is 0.05 or more, and
- the repeating unit having an acid-decomposable group included in the resin (A) and the resin (B) is represented by General Formula (Aa2),
- in General Formula (Aa2), R101 represents a hydrogen atom, a fluorine atom, an iodine atom, an alkyl group, or an aryl group, and R102 represents a group that leaves by an action of an acid.
7 more elements
Dependencies are inferred from the claim text.