Power splitters including a tunable multimode interference coupler
AssigneesGlobalFoundries U.S. Inc., Khalifa University of Science and Technology
InventorsMichal Rakowski, Yusheng Bian, Roderick A. Augur, Ayat M. Taha, Marios Papadovasilakis, Yonas Hadush Gebregiorgis, Jaime Viegas
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Abstract
Structures for a power splitter that include a multimode interference coupler and methods of forming such structures. The structure comprises a multimode interference coupler including a grating having a plurality of grating lines, an input waveguide core, and an output waveguide core. The grating lines are disposed between the input waveguide core and the output waveguide core. The structure further comprises a resistive heating element adjacent to the grating lines.
Claims20
A structure for a power splitter, the structure comprising:
- a multimode interference coupler including a grating having a plurality of grating lines, a first input waveguide core, and a first output waveguide core, the grating lines disposed between the first input waveguide core and the first output waveguide core;
- and
- a first resistive heating element adjacent to the grating lines,
- wherein the grating lines have a first duty cycle that decreases with a first variable rate from the first input waveguide core toward a center of the grating, and the grating lines have a second duty cycle that increases with a second variable rate from the center of the grating toward the first output waveguide core.
A method of forming a structure for a power splitter, the method comprising:
- forming a multimode interference coupler including a grating having a plurality of grating lines, an input waveguide core, and an output waveguide core, wherein the grating lines are disposed between the input waveguide core and the output waveguide core;
- and
- forming a resistive heating element adjacent to the grating lines,
- wherein the grating lines have a first duty cycle that decreases with a first variable rate from the input waveguide core toward a center of the grating, and the grating lines have a second duty cycle that increases with a second variable rate from the center of the grating toward the output waveguide core.
Dependencies are inferred from the claim text.