Method of generating a spatially limited film stack on a light sensor element
AssigneeRolic Technologies AG
InventorsDavid Pires, Richard Frantz
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Abstract
The present invention relates to a method for manufacturing a spatially limited film stack comprising an optically anisotropic film on an optical sensor device with a light sensor element, such that the film stack covers the light sensor element but not the entire surface area of the optical sensor device. An electronic device manufactured according to the method of the invention can be used for analyzing the polarization state of light.
Claims15
A method for manufacturing a spatially limited film stack (14, 21a, 24a) comprising at least one optically anisotropic film (32, 34, 36) on a light sensor element (11, 11a, 11b) of an optical sensor device (10a), comprising a first light sensor element (11a) and a second light sensor element (11b),
- wherein the spatially limited film stack (14, 21a, 24a) covers the light sensor element (11, 11a, 11b) but not the entire surface area of the optical sensor device (10a), the method comprising the steps:
- providing the optical sensor device (10a) with a light sensor element (11, 11a, 11b), wherein the light sensor element (11, 11a, 11b) does not extend over the entire area of the optical sensor device (10a),
- preparing a film stack (21) comprising one or more oriented polymerized liquid crystal layer(s) (32, 34, 36) including a first oriented polymerized liquid crystal layer (32, 36) on the optical sensor device (10a), wherein at least in one polymerized liquid crystal layer (34, 36) an orientation pattern is generated, such that the orientation of the liquid crystals in the area above the first light sensor element (11a) is different from the orientation in the area above the second light sensor element (11b), and
- forming the spatially limited film stack (14, 21a, 24a) by selectively removing material from the film stack (21) by dry or wet etching.
An electronic device (20) comprising:
- an optical sensor device (10a) with a light sensor element (11, 11a, 11b) comprising a first light sensor element (11a) and a second light sensor element (11b);
- and
- a spatially limited film stack (14, 21a, 24a) comprising one or more oriented polymerized liquid crystal layer(s) (32, 34, 36),
- wherein the spatially limited film stack (14, 21a, 24a) covers both light sensor elements (11a, 11b), but not the full area of the optical sensor device (10a), wherein at least in one polymerized liquid crystal layer (34, 36) an orientation pattern is generated, such that the orientation of the liquid crystals in the area above the first light sensor element (11a) is different from the orientation in the area above the second light sensor element (11b).
Dependencies are inferred from the claim text.