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US 12,619,015 B2Granted
Method of manufacturing optical member
AssigneeNichia Corporation
InventorTakaaki Tada
Life of this patent
Estimating the term…
Abstract
A method of manufacturing an optical member includes forming a first layer on a light transmissive substrate by atomic layer deposition, converting a surface layer of the first layer into a boehmite layer, and forming a second layer by atomic layer deposition so as to cover the boehmite layer. The first layer includes aluminum oxide and has a first thickness. The second layer has a second thickness less than the first thickness.
Claims18
A method of manufacturing an optical member, the method comprising:
- forming a first layer on a light transmissive substrate by atomic layer deposition, the first layer comprising aluminum oxide and having a first thickness;
- converting a surface layer of the first layer into a boehmite layer;
- and
- after converting the surface layer of the first layer into the boehmite layer, forming a second layer on the boehmite layer by atomic layer deposition such that the second layer covers the boehmite layer and forms an outermost layer of the optical member, the second layer having a second thickness less than the first thickness.
1 more element
Dependencies are inferred from the claim text.